Our Products
Comprehensive solutions for substrate processing
amc
Fully automatic single-wafer processing
Our amc series offers compact, individually configurable, fully automatic single-wafer processing equipment for a great variety of process options and manifold requirements in terms of throughput and flexibility.
amr
Semi-automatic single-wafer processing
The semi-automatic single-wafer processing machines of our modular amr series have been optimized for the requirements in the highly flexible field of single-wafer and small-lot production of wafer sizes between 2“ and 300 mm.
amv
Automatic HMDS batch-wafer processing
Our amv 200 batch equipment increases efficiency of HMDS processing of substrates because a large number of substrates can be processed simultaneously, and process time is a lot shorter than with HMDS ovens. So, throughput noticeably rises.
ams
Digital process control with ams PILOT software
Our modern, self-explanatory ams PILOT software provides for intelligent and complete control of all processes in amcoss equipment or other manufacturers´ machines. It complies with Semi Standard E95-1101.
Accessories
Sophisticated accessories for our amcoss equipment or rather for retrofitting of machines from other manufacturers, e.g. our trap tank system and a vending machine for the optimum storage and supply on demand of resists within the production process supplement and complete our broad range of products.