Comprehensive solutions for substrate processing
Our amc series offers compact, individually configurable, fully automatic single-wafer processing equipment for a great variety of process options and manifold requirements in terms of throughput and flexibility.
The semi-automatic single-wafer processing machines of our modular amr series, as well as both models of our amt tabletop hotplate have been optimized for the requirements in the highly flexible field of single-wafer and small-lot production of wafer sizes between 2“ and 300 mm.
Our amv 200 batch equipment increases efficiency of HMDS processing of substrates because a large number of substrates can be processed simultaneously, and process time is a lot shorter than with HMDS ovens. So, throughput noticeably rises.
Our modern, self-explanatory ams PILOT software provides for intelligent and complete control of all processes in amcoss equipment or other manufacturers´ machines. It complies with Semi Standard E95-1101.
In order to control process temperature in microsystems or other manufacturing technologies amcoss offers amh heat exchangers as well as amh chillers for temperatures ranging from 0 °C to 95 °C. They replace temperature control units of other manufacturers.
Sophisticated accessories for our amcoss equipment or rather for retrofitting of machines from other manufacturers, e.g. our trap tank system and a vending machine for the optimum storage and supply on demand of resists within the production process supplement and complete our broad range of products.