– Partner der Mikrochipfertigung.– partner of microchip production.Our amc series offers compact, individually configurable, fully automatic single-wafer processing equipment for a great variety of process options and manifold requirements in terms of throughput and flexibility.
The semi-automatic single-wafer processing machines of our modular amr series have been optimized for the requirements in the highly flexible field of single-wafer and small-lot production of wafer sizes between 2“ and 300 mm.
Our amv 200 batch equipment increases efficiency of HMDS processing of substrates because a large number of substrates can be processed simultaneously, and process time is a lot shorter than with HMDS ovens. So, throughput noticeably rises.
Our modern, self-explanatory ams PILOT software provides for intelligent and complete control of all processes in amcoss equipment or other manufacturers´ machines. It complies with Semi Standard E95-1101.
Sophisticated accessories for our amcoss equipment or rather for retrofitting of machines from other manufacturers, e.g. our trap tank system and a vending machine for the optimum storage and supply on demand of resists within the production process supplement and complete our broad range of products.
amcoss as exhibitor at the E-Forum of the HTL Rankweil
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With our single- and batch-wafer processing equipment a great variety of different processes for coating, developing, cleaning, lift-off and cooling/heating of substrates can be realized. Many clever and useful features are standard and various selectable options do offer individual benefits as required.
amcoss production site of BU systems in Koblach
We, amcoss GmbH, are an innovative, internationally operating High-Tech company in the semiconductor and microsystems technology industry. amcoss is in the possession of vast expert knowledge in the field of substrate processing. Well known manufacturers in the market are our customers.
Our head office is located in Feldkirch (Vorarlberg, Austria) in a modern, industrial region characterized by medium sized businesses, in the most western part of Austria. From here we sell our products and services around the globe.
Fully- & semi-automated equipment & systems for single-wafer processing
Coating, developing, cleaning, lift-off, etching, heating/cooling, software, HMDS
Extensive know-how in optics and mechatronics
For many years we have been offering extensive engineering and highly specialized repair services for quality components in optics and mechatronics (photolithography, RTP, CVD, FPI, metrology and plasma), carried out in our specialized in-house laboratory. Our heat exchangers and chillers are plug-and-play devices configured with personalised interfaces for controlling the process temperature.
Since the beginning of 2023 amcoss GmbH has been part of the Lab14 group with approx. 1000 employees worldwide. The companies in the field of micro- and nanotechnology mutually strengthen one another by using synergy effects.
