– Partner der Mikrochipfertigung.– partner of microchip production.Our amc series offers compact, individually configurable, fully automated single-wafer processing equipment for a great variety of process options and manifold requirements in terms of throughput and flexibility.
The semi-automated single-wafer processing machines of our modular amr series have been optimized for the requirements in the highly flexible field of single-wafer and small-lot production of wafer sizes between 2“ and 300 mm.
Our amv 200 batch equipment increases efficiency of HMDS processing of substrates because a large number of substrates can be processed simultaneously, and process time is a lot shorter than with HMDS ovens. So, throughput noticeably rises.
Our modern, self-explanatory ams PILOT software provides for intelligent and complete control of all processes in amcoss equipment or other manufacturers´ machines. It complies with Semi Standard E95-1101.
Sophisticated accessories for our amcoss equipment or rather for retrofitting of machines from other manufacturers, e.g. our trap tank system and a vending machine for the optimum storage and supply on demand of resists within the production process supplement and complete our broad range of products.
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With our single- and batch-wafer processing equipment a great variety of different processes for coating, developing, cleaning, lift-off and cooling/heating of substrates can be realized. Many clever and useful features are standard and various selectable options do offer individual benefits as required.
amcoss production site of BU systems in Koblach
amcoss GmbH, is an innovative, internationally active high-tech company in the semiconductor- and microsystems technology industries. amcoss globally cooperates with strong, specialized partners and well-known manufacturers are among our customers.
The two company sites in Feldkirch and Koblach are located in Vorarlberg, a modern industrial region in the west of Austria characterised by modern SMEs. From here we sell our products and services around the globe.
(Site location Koblach)
Fully- and semi-automated equipment & systems for single-wafer processing
amcoss possesses years of experience and enormous expert knowledge in the field of wafer- and substrate processing. With our fully automatic amc- and semi automatic amr equipments we offer tools for coating-, developing-, cleaning-, lift-off-, etching-, and temperature control processes.
(Site location Feldkirch – headquarters)
Engineering components for optics and mechatronics
E.g. lenses, filters, mirrors, reflectors, fiber-optics, wafer-chucks, wafer-handlers, wafer-end-effectors, etc.
Refurbishment/repair of optical & mechanical components
E.g. lenses, mirrors, reflector plates, shutters, image shifters, exposure chucks, lamphouses, ball bearings, zoom-lenses, masking-blades, Wafertec pumps, etc.
Heat exchangers & chillers
These individually configured devices are prepared for plug-and-play use, ensuring efficient temperature control of processes.
Since the beginning of 2023 amcoss GmbH has been part of the Lab14 group with approx. 1000 employees worldwide. The companies in the field of micro- and nanotechnology mutually strengthen one another by using synergy effects.
