– Partner der Mikrochipfertigung.– partner of microchip production.Our amc series offers compact, individually configurable, fully automatic single-wafer processing equipment for a great variety of process options and manifold requirements in terms of throughput and flexibility.
The semi-automatic single-wafer processing machines of our modular amr series, as well as both models of our amt tabletop hotplate have been optimized for the requirements in the highly flexible field of single-wafer and small-lot production of wafer sizes between 2“ and 300 mm.
Our amv 200 batch equipment increases efficiency of HMDS processing of substrates because a large number of substrates can be processed simultaneously, and process time is a lot shorter than with HMDS ovens. So, throughput noticeably rises.
Our modern, self-explanatory ams PILOT software provides for intelligent and complete control of all processes in amcoss equipment or other manufacturers´ machines. It complies with Semi Standard E95-1101.
In order to control process temperature in microsystems or other manufacturing technologies amcoss offers amh heat exchangers as well as amh chillers for temperatures ranging from 0 °C to 95 °C. They replace temperature control units of other manufacturers.
Sophisticated accessories for our amcoss equipment or rather for retrofitting of machines from other manufacturers, e.g. our trap tank system and a vending machine for the optimum storage and supply on demand of resists within the production process supplement and complete our broad range of products.
Read more about the 👉 interesting application of an amcoss amc single wafer processing tool, its features and how it is being used at Jenoptik Berlin-Adlershof.
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With our single- and batch-wafer processing equipment a great variety of different processes for coating, developing, cleaning, lift-off and cooling/heating of substrates can be realized. Many clever and useful features are standard and various selectable options do offer individual benefits as required.
We, amcoss GmbH, are an innovative, internationally operating High-Tech company in the semiconductor and microsystems technology industry. amcoss is in the possession of vast expert knowledge in the field of substrate processing as well as with devices for process temperature control. Well known manufacturers in the market are our customers.
Our head office is located in Feldkirch (Vorarlberg, Austria,) in a modern, industrial region characterized by medium sized businesses, in the most western part of Austria. From here we sell our products and services around the globe.
Equipment & Systems for single- and batch-wafer processing
Coating, developing, cleaning, lift-off, heating/cooling, software, HMDS, temperature control
Engineering components for optics and mechatronics
E.g. lenses, filters, mirrors, reflectors, fiber-optics, wafer-chucks, wafer-handlers, wafer-end-effectors, etc.
Refurbishment/repair of optical & mechanical components
E.g. lenses, mirrors, reflector plates, shutters, image shifters, exposure chucks, lamphouses, ball bearings, zoom-lenses, masking-blades, Wafertec pumps, etc.
For many years we have been offering extensive engineering and highly specialized repair services for quality components in optics and mechatronics (photolithography, RTP, CVD, FPI, metrology and plasma), carried out in our specialized in-house laboratory. amcoss also cooperates with strong, specialized partners all around the world.
