semicon

12. February 2021 |

Novel recycling of Chrome echant!

Chrome etching and sustainable, eco-friendly processes are no longer a contradiction!

FIMA-Chem GmbH and amcoss GmbH have jointly developed a turnkey solution for chrome etching. While FIMA-Chem supplies the spiking chemicals, amcoss has engineered and integrated the appropriate hardware into the amcoss single wafer processing equipment.

Using a novel technique, we can recycle the etchant on the tool which can then directly be re-used to process another substrate. Highly concentrated additives are employed to replenish the used-up etchant thus preparing it for another run. So, the etching chemical is used at maximum efficiency, reducing the impact on the environment and saving a significant amount of etchant costs.

Benefits_

  • Significant decrease of processing costs
  •  Vastly reduced impact on the environment due to reduced use of chemicals and less waste

Additionally, expensive cleanroom space is saved due to the most compact footprint of our equipment: our amc 500 model, for example, offers flexible wet processes on less than 1 m2.

Want to learn more about it? Then visit our virtual booth at the Technology Unites Global Summit and get more information. We are looking forward to meeting you there!

https://www.technologyunites.org/

 

Download flyer amcoss amc 500

  • EN
  • DE
  • Diese Seite kann im Internet Explorer unter Version 9 nicht angezeigt werden. Bitte updaten Sie Ihren Internet Explorer oder laden Sie sich einen alternativen Browser herunter (zB. Firefox, Chrome etc.) Vielen Dank für Ihr Verständnis!